KLA | Investor Day Presentation Deck | 142 slides

Slide schematic 7/7

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Components 7

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Tools 1

The slide presents a clear before-and-after comparison with 'e-Beam overlay is used as a calibration input for improved optical overlay accuracy' and '4.5x reduction in optical overlay inaccuracy with e-beam calibration'.

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Frameworks 1

before-after-bridge 90%

Shows the transition from optical measurements to improved accuracy via e-beam assist

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Uses a process flow diagram to show the integration of Archer and SEMREG systems.