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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "Lasertec's actinic EUV tool is so defective and unreliable that TSMC, Intel, and Samsung have all quietly substituted non-EUV alternatives for inspecting EUV masks.",
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      "text": "The executive stated that TSMC has reverted to the EUV mask inspection process it used before Lasertec launched its actinic EUV tool in 2019/2020...",
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      "text": "The expert added that he is friendly with the CEO of Holon - a Japanese company that makes the e-beam tool used by TSMC and that it is rapidly gaining adoption...",
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      "text": "10. Lasertec's actinic EUV tool is so defective and unreliable that TSMC, Intel, and Samsung have all quietly substituted non-EUV alternatives for inspecting EUV masks...",
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      "text": "“...parallel inspections of the same masks...just to make sure there are no defects.” — Japanese semiconductor executive. “TSMC was the first one to adopt the Holon tool...Samsung, Intel, and most of the other customers in the EUV space are also adopting the Holon tool.” — Industry expert.",
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