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      "text": "The third fatal problem with Lasertec's EUV-based inspection tool, in addition to contamination/debris and light source instability/flickering, is pitifully low reliability that leads to low uptime and throughput.",
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      "text": "Expert testimony on light source instability and Intel's potential bias; low reliability/uptime issues (60-65%) compared to ASML (96%); maintenance challenges; executive confirmation of secrecy and reliability concerns.",
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      "text": "\"I asked Ushio what was wrong with their source, and they wouldn't say...if your source is not stable, then the intensity of light coming in through it fluctuates...so you have a stability issue...they gave us the data, and we had about six to seven different models of Ushio data...the bottom line is that there is something wrong.\" — Leading EUV lithography expert",
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      "text": "3. Lasertec's flagship ACTIS EUV product line is defective with a fatally flawed EUV light source (cont'd)",
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