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  "documentTitle": "Lasertec Corporation (6920)",
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  "authorName": "Scorpion Capital",
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  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "Industry research note regarding Lasertec's competitive decline in EUV mask inspection.",
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      "text": "レーザーテックの極端紫外線装置があまりに不良で信頼性が低いために、主要な顧客であるTSMC、インテル、サムスンは極端紫外線マスクを検査するために水面下で“非極端紫外線”の検査法を代用している",
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      "text": "レーザーテックのEUV装置の信頼性不足により、Intel、TSMC、SamsungがHHG光源を用いた独自検査装置を開発・使用している。",
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      "text": "アクティニック検査の重要性と、電子ビームソリューションの必要性について言及。",
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      "text": "KLAの技術的進歩とASMLのマルチビーム開発がレーザーテックの市場シェアを脅かしており、業界内ではレーザーテックの優位性はあと2年程度と予測されている。",
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      "text": "高開口数（High-NA）リソグラフィの台頭により、レーザーテックの技術的優位性が失われつつあり、電子ビーム検査へのシフトが加速している。",
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      "text": "「彼らは低出力の極端紫外線光源の技術であるHHGを使って、実質的に“自前”の検査装置を開発しました。インテルもそうしました。インテルは公表しませんが、実際に開発済みです。結果として3社とも同じような技術を使うようになりました。HHG、出力は微々たるものです。みんな開発していました。水面下でする会社もあれば、堂々と開発する会社もありました。サムスンはまだその装置を使っています。TSMCも。インテルもまだ使っているんじゃないかと思いますが、インテルは非常にプライベートな姿勢です。」 — 半導体専門家",
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      "text": "第10部 レーザーテックの極端紫外線装置が信頼性を欠き、主要顧客が代替技術へ移行中",
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