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  "documentTitle": "Lasertec Corporation (6920)",
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  "presentationDate": "2024-06-05 00:00:00",
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      "text": "レーザーテック製の極端紫外線検査装置の光学系全体を少なくとも毎年、交換しなければいけないことが調査取材によって明らかになった。",
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      "text": "汚染のため、光学系を毎年交換する必要があり、費用は100万ドル以上。光源の寿命は短く、顧客はバックアップ装置の購入を強いられる。また、マスクステージも汚染の原因となる構造的欠陥があり、ASMLの磁気浮上式とは異なり、粗末な空圧式を採用しているため粒子を放出する。",
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      "text": "「極端紫外線の光源には化合物の単層が重なり、いずれ機能しなくなるために交換しなければいけなくなります。」 — 調査取材対象者",
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      "text": "第3部　レーザーテックの看板製品であるACTIS EUVシリーズは光源が致命的な問題を抱えており、製品として不良だ（続）",
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