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  "documentTitle": "Lasertec Corporation (6920)",
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  "authorName": "Scorpion Capital",
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  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "The slide highlights the frequent use of 'simulation' or 'simulator' in the paper as evidence of a lack of real-world performance data.",
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      "text": "レーザーテックが国際光工学会の会議でACTIS A300の高開口数性能について2023年11月21日付けで発表した論文（抜粋）",
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      "text": "論文は、装置を実際に使った成果の報告を記載しないかわりに、数学のモデルとそれに基づいたシミュレーションを紹介する。",
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      "text": "Excerpt from the technical paper showing simulation results.",
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      "text": "論文のなか、A300の高開口数の検査性能に関するひとつの小さめな項目において、「simulation」あるいは「simulator」という単語は6回も浮上する。",
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      "text": "ACTIS A300とその「高開口数対応」の実態に疑問を投げかけるもうひとつの問題は、レーザーテックの論文には、実際の装置のマスク検査性能について具体的な報告がないことだ。論文は、装置を実際に使った成果の報告を記載しないかわりに、数学のモデルとそれに基づいたシミュレーションを紹介する。現に、「simulation」あるいは「simulator」は文中に多発する（下記の例文参照）。もしACTIS A300とその高開口数対応の技術に実態があれば、ASML、カールツァイスなどと同様に、論文を執筆したレーザーテックのエンジニアは信憑性のある情報を盛り込めたはずだ。",
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      "text": "To assess the inspection capability of the High-NA ACTIS A3XX, we performed imaging simulations using a rigorous optical simulator with electromagnetic calculations with conditions of circular illumination and a standard TaBn-based absorber with a thickness of 70 nm. — Lasertec technical paper (SPIE Conference Proceedings)",
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      "text": "出典：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12751/1275102/Actinic-pattern-mask-inspection-for-high-NA-EUV-lithography/10.1117/12.2686350.short?webSyncID=9e6ec7a4-9dab-6a0c-bad0-59329ad883c9&sessionGUID=d902bc99-93ce-d268-bead-49a28531ab0d",
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