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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "このことにより、「Urashima」は「TEUS」を偽装したもので、決して「新たに設計された」光源ではないことが明らかだ。",
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      "text": "Isteqとその親会社であるロシアのRnD-ISANは、レーザー生成プラズマ方式の光源技術について、2020年に共同で国際特許出願を提出している。このことにより、「Urashima」は「TEUS」を偽装したもので、決して「新たに設計された」光源ではないことが明らかだ。",
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      "text": "出典: https://patentimages.storage.googleapis.com/78/09/07/ee8f012cefba27/WO2020216950A1.pdf https://www.euvlitho.com/2021/SS19.pdf",
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      "text": "Isteqが2021年にオンラインで開催されたEUVLSupplier Showcaseで掲載した同社のレーザー生成プラズマ方式の光源を謳う販促資料",
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