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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "レーザーテックは、Urashimaは「新たに設計された」極端紫外線光源だと主張する。しかし実際のところは、Isteqが10年以上前に開発したレーザー生成プラズマ方式の光源だ。",
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      "text": "レーザーテックは、Urashimaは「新たに設計された」極端紫外線光源だと主張する。しかし実際のところは、Isteqが10年以上前に開発したレーザー生成プラズマ方式の光源だ。極端下緯線光源に関しては、仕入れ先の選択肢は2、3社しかない。したがって、レーザーテックはACTIS A150を完成し、2019年に発売する前に、Isteq製の光源も候補として検討したはずだ。検討したうえであえて却下し、ウシオ製の光源を選んだ。現在、ウシオ製を選択したことで被った損益を必死に挽回しようとしており、一か八かでIsteqを採用してみたという段階だろう。下記にて、Isteq製のレーザー生成プラズマ方式の光源に関して、過去2013年に遡るプレゼンテーション資料と学術論の事例を紹介する。",
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      "text": "Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology — A. Yu. Vinokhodov; M. S. Krivokorytov; Yu. V. Sidelnikov; V. M. Krivtsun; V. V. Medvedev; K. N. Koshelev",
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      "text": "出典: https://www.euvlitho.com/2013/S40.pdf; https://pubs.aip.org/aip/jap/article-abstract/120/16/163304/133078/Droplet-based-high-brightness-extreme-ultraviolet?redirectedFrom=fulltext",
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