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  "documentTitle": "Lasertec Corporation (6920)",
  "authorId": "58_Scorpion_Capital",
  "authorName": "Scorpion Capital",
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  "sourceTypeLabel": "Short seller",
  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "The slide uses a KLA presentation to critique the reliability of plasma-based EUV light sources.",
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      "text": "Electrode surface after one shot in a HCT discharge showing cathode spots",
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      "text": "Every % of tool availability is critical for mask shops that run 24/7. Anything less than 85% is not acceptable. In APMI, the source has to be highly reliable to avoid impact to overall system availability. Plasmas are efficient EUV sources, but to produce one the matter must be ablated > 5000 times per second. The problem of target recovery and life-time is the biggest challenge. This includes life-time of any component facing plasma and/or being in close proximity to it. Example of electrode erosion in discharges: H. Verbraak et al., J. Appl. Phys. 108, 093304 (2010); J. Pankert et al., Proc. SPIE 6151, 61510Q (2006). Electrode mass loss is about 1 g per Mshot (corresponds to 5 kg per 10 days). Electrode life-time of 2 billion shots is reported for LDP concept (corresponds to ~5 days @ 5 kHz). For an inspection tool, replacement of components (e.g. electrodes) every week is not an option. Maintenance time of 5-10% represents a serious problem for the entire tool availability.",
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      "text": "KLAは極端紫外線マスク検査装置に関するプレゼンテーションの中で、光源のアップタイムが絶対的な条件だと力説する。「マスク工場は毎日24時間稼働しなければいけないので、各装置の稼働率の1%、1%が極めて重要だ。85%以下の稼働率は許されない。......光源は、工場全体の稼働率に悪影響を及ぼさないように信頼性が高くなければいけない」。プラズマ方式の光源が特に難題だとし、その理由について次のように語る。「1秒につき、5000回以上のアブレーションが必要だ」「寿命が最大の課題だ」「電極などの部品を毎週交換するという選択肢はない」「整備が総時間に5%～10%も食い込むと、装置の総稼働率について重要な問題になる」。",
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      "text": "L. Juschkin, G. Derra, and K. Bergmann, \"EUV light sources\", from Low temperature plasmas, ed. R. Hippler et al. (2008)",
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      "text": "Production systems need high availability and long life-time",
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