{
  "docId": "019dd923-622c-750b-8b9a-26b63f68bb16",
  "docSlug": "9abaa7a9bbfc",
  "documentTitle": "Lasertec Corporation (6920)",
  "authorId": "58_Scorpion_Capital",
  "authorName": "Scorpion Capital",
  "documentKindSlug": "activist-deck",
  "documentKindLabel": "Activist deck",
  "sourceTypeSlug": "short_seller",
  "sourceTypeLabel": "Short seller",
  "presentationDate": "2024-06-05 00:00:00",
  "orientation": "landscape",
  "aspectRatio": 1.3333334,
  "pageNumber": 108,
  "pageCount": 334,
  "prevPage": 107,
  "nextPage": 109,
  "slideType": "appendix_data",
  "function": "illustrate_case",
  "density": "sparse",
  "nDataPoints": 0,
  "notes": "The slide uses visual evidence to support a technical critique of the equipment's reliability.",
  "elementsJson": [
    "paragraph",
    "screenshot"
  ],
  "metadataConfidence": 0.95,
  "imagePath": null,
  "slideHref": "/slides/019dd923-622c-750b-8b9a-26b63f68bb16/108",
  "deckHref": "/decks/019dd923-622c-750b-8b9a-26b63f68bb16",
  "deckJsonHref": "/decks/019dd923-622c-750b-8b9a-26b63f68bb16.json",
  "deckAnchorHref": "/decks/019dd923-622c-750b-8b9a-26b63f68bb16#slide-108",
  "components": [
    {
      "bbox": {
        "h": 0.65,
        "w": 0.67,
        "x": 0.07,
        "y": 0.17
      },
      "kind": "image",
      "text": "Collection of microscopic images showing tin debris and contamination",
      "attrs": null,
      "subkind": "illustration",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "c063fd51-2e6a-496d-ad13-5ce7b733d9d3",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.05,
        "w": 0.91,
        "x": 0.07,
        "y": 0.06
      },
      "kind": "paragraph",
      "text": "各論文には、液体錫の飛沫やデブリがレーザーテック製の極端紫外線マスク用の検査装置内の鏡などの光学系に付着・汚染し、被害をもたらす姿を確認できる画像が掲載されている。",
      "attrs": null,
      "subkind": "paragraph",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "29ac3c2a-f5e2-4091-a796-9dee901ff566",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.04,
        "w": 0.35,
        "x": 0.07,
        "y": 0.94
      },
      "kind": "source-note",
      "text": "出典：https://arxiv.org/ftp/arxiv/papers/1801/1801.06355.pdf, https://www.euvlitho.com/2019/S73.pdf",
      "attrs": {
        "numbered": true
      },
      "subkind": null,
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "60f96e3e-7dc9-4abd-a0de-275f0f04f892",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.03,
        "w": 0.63,
        "x": 0.07,
        "y": 0.13
      },
      "kind": "title",
      "text": "各論文に掲載されている極端紫外線を発生するために使用される錫プラズマの代表的な画像",
      "attrs": null,
      "subkind": "headline",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "56681cf1-7517-4297-8a74-c496ab43986e",
      "frameworkName": null,
      "frameworkSlug": null
    }
  ],
  "metrics": [],
  "tools": [],
  "frameworks": [],
  "arcBeats": [],
  "loops": [],
  "imagePathAlt": null,
  "thumbSrc": null,
  "thumbSrcAlt": null,
  "locked": true
}