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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "この仕組みによって、レーザーテック製の装置の中に、錫の飛沫やデブリの汚れが発生することは間違いない。",
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      "text": "「レーザー支援放電生成プラズマ方式の極端紫外線光源は、アクティニックのパターンマスク検査技術を成立させるうえで最も重要な要因だ」\n「レーザー照射によって錫を蒸発させて錫蒸気の雲を生成する」",
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      "text": "共同論文では、極端紫外線光源の主要な部品が紹介されている：液体錫浴、液体錫に浸って回転するふたつの錫供給ディスクからなる光源部、自動車の点火プラグを思わせるような動作で錫を発火させて極端紫外線を発し、プラズマを生成する電極・キャパシターのユニット。この仕組みによって、レーザーテック製の装置の中に、錫の飛沫やデブリの汚れが発生することは間違いない。",
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      "text": "出典：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11609/116090L/Laser-assisted-discharge-produced-plasma-LDP-EUV-source-for-actinic/10.1117/12.2588788.short",
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