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  "documentTitle": "Lasertec Corporation (6920)",
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  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "The slide uses an expert quote to highlight a discrepancy between claimed EUV inspection and actual DUV/HHG usage.",
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      "text": "Intel and TSMC are using three different workarounds due to problems with Lasertec’s EUV machine; customers are misrepresenting non-EUV inspections and claiming they are EUV",
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      "text": "Tin-based plasma and HHG are the only two methods for producing EUV light to power actinic mask inspection. Only tin can produce EUV light at sufficient power and brightness for applications such as ASML’s scanner; both the Ushio and Isteq sources Lasertec has tried are also tin-based, but defective. HHG is not a replacement for a proper actinic EUV source, but it illustrates that TSMC, Intel, and Samsung are able to improvise and get by without Lasertec’s defective EUV inspection tool through a combination of HHG, KLA’s DUV systems, and electron beam systems like Holon’s. The EUV lithography expert stated that “they’re doing a combination of these things” and expressed surprise that “some of the inspections that I was told were done with EUV machines from Lasertec were actually done with [their] 193nm machines” – that is, Lasertec’s old DUV systems.",
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      "text": "I don't know how many HHG machines they are using because they're doing a combination of three things: they have the KLA machines, they have Lasertec's non-EUV machines. In fact, some of the inspections that I was told were done with EUV machines from Lasertec were actually done with 193nm machines from Lasertec. So, they have KLA machines, they have Lasertec machines, both with 193. And they have HHG machine, and then they have Lasertec EUV machine .” – Leading EUV lithography expert close to Lasertec's customers",
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      "text": "“I don't know how many HHG machines they are using because they're doing a combination of three things: they have the KLA machines, they have Lasertec's non-EUV machines. In fact, some of the inspections that I was told were done with EUV machines from Lasertec were actually done with 193nm machines from Lasertec. So, they have KLA machines, they have Lasertec machines, both with 193. And they have HHG machine, and then they have Lasertec EUV machine .” — Leading EUV lithography expert close to Lasertec's customers",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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