{
  "docId": "019dd923-622c-750b-8b9a-0f4bec37392f",
  "docSlug": "f982379e2e48",
  "documentTitle": "Lasertec Corporation (6920)",
  "authorId": "58_Scorpion_Capital",
  "authorName": "Scorpion Capital",
  "documentKindSlug": "activist-deck",
  "documentKindLabel": "Activist deck",
  "sourceTypeSlug": "short_seller",
  "sourceTypeLabel": "Short seller",
  "presentationDate": "2024-06-05 00:00:00",
  "orientation": "landscape",
  "aspectRatio": 1.3333334,
  "pageNumber": 291,
  "pageCount": 334,
  "prevPage": 290,
  "nextPage": 292,
  "slideType": "testimonial",
  "function": "cite_precedent",
  "density": "dense",
  "nDataPoints": 0,
  "notes": "The slide uses expert testimony to preempt the argument that actinic inspection is strictly required for EUV masks.",
  "elementsJson": [
    "paragraph",
    "quote_block",
    "footnote"
  ],
  "metadataConfidence": 1,
  "imagePath": null,
  "slideHref": "/slides/019dd923-622c-750b-8b9a-0f4bec37392f/291",
  "deckHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f",
  "deckJsonHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f.json",
  "deckAnchorHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f#slide-291",
  "components": [
    {
      "bbox": null,
      "kind": "callout",
      "text": "a well-engineered system is more important than the wavelength",
      "attrs": null,
      "subkind": null,
      "toolName": "Visual emphasis",
      "toolSlug": "visual-emphasis",
      "confidence": null,
      "componentId": "019dd953-78b7-702e-961d-f59c33ec08ea",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.25,
        "w": 0.86,
        "x": 0.07,
        "y": 0.22
      },
      "kind": "paragraph",
      "text": "While actinic mask inspection in theory “is the best way to do that” – using EUV so that the wavelength used in mask inspection is the same as that used to write the mask - it’s only true “if the system is well-engineered,” which the Lasertec system is not. He pointed to “an award announced at last year’s EUV mask event about the work that KLA and others have done about supporting EUV mask inspection with other methods” – “a well-engineered system is more important than the wavelength”; “the DUV tools actually do work [for EUV masks]...those tools work really well and have been well-engineered for a long period of time.”",
      "attrs": null,
      "subkind": "paragraph",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "a98c5c55-8831-41db-8889-a909882db8e5",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.22,
        "w": 0.86,
        "x": 0.07,
        "y": 0.72
      },
      "kind": "quote",
      "text": "KLA non-actinic DUV alternatives are “work really well” and are “well-engineered”; EUV wavelength is less important\n“The current KLA systems are pretty good, but they're not as good as actinic. Having said that, a well-engineered system is more important than the wavelength...they're using the current DUV tools, and it was announced at the most recent conference that people who are appreciating all the work that KLA did on supporting EUV with the DUV tools. EUV and DUV are different but for supporting EUV inspection, the DUV tools actually do work...Those tools work really well and have been well-engineered for a long period of time. That's what people use. I think today, I think people are using the Lasertec actinic pattern mask inspection tool - they use that when it works...” – Ex-KLA director of engineering focused on EUV mask inspection",
      "attrs": null,
      "subkind": "testimonial",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "6539e5b5-789e-433d-8d5e-f43794fd169a",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.22,
        "w": 0.86,
        "x": 0.07,
        "y": 0.49
      },
      "kind": "quote",
      "text": "Alternative methods for EUV mask inspection; KLA recently won an award for non-actinic method\n“I worked on the actinic project. I've worked on the DUV project, and I worked on the electron beam project. I worked on all three of those. I know them all very well...I would say that Lasertec definitely launched the actinic mask inspection capability sooner than KLA did; however, there are alternatives. In fact, there was an award announced at last year’s EUV mask event about the work that KLA and others have done about supporting EUV mask inspection with other methods. So, there are alternatives for the inspection. Having said that, I do think that the actinic mask inspection is the best way to do that if the system is well-engineered. I do think there are current alternatives. KLA has an electron beam system, and they have a D2B system, and KLA is working on an EUV system.” – Ex-KLA director of engineering focused on EUV mask inspection",
      "attrs": null,
      "subkind": "testimonial",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "d9269ff4-a2e7-4d3b-aee0-58834d36f875",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": null,
      "kind": "quote",
      "text": "I worked on the actinic project. I've worked on the DUV project, and I worked on the electron beam project. I worked on all three of those. I know them all very well...I would say that Lasertec definitely launched the actinic mask inspection capability sooner than KLA did; however, there are alternatives. In fact, there was an award announced at last year's EUV mask event about the work that KLA and others have done about supporting EUV mask inspection with other methods. So, there are alternatives for the inspection. Having said that, I do think that the actinic mask inspection is the best way to do that if the system is well-engineered. I do think there are current alternatives. KLA has an electron beam system, and they have a D2B system, and KLA is working on an EUV system. — Ex-KLA director of engineering focused on EUV mask inspection",
      "attrs": null,
      "subkind": null,
      "toolName": "Authority citation",
      "toolSlug": "authority-citation",
      "confidence": null,
      "componentId": "019dd953-78b7-702e-961d-face8f4431c3",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.03,
        "w": 0.3,
        "x": 0.07,
        "y": 0.95
      },
      "kind": "source-note",
      "text": "Source: Scorpion Capital consultation calls with experts",
      "attrs": null,
      "subkind": null,
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "96741808-a0dd-4191-825f-dd3e0dc903a7",
      "frameworkName": null,
      "frameworkSlug": null
    },
    {
      "bbox": {
        "h": 0.15,
        "w": 0.86,
        "x": 0.07,
        "y": 0.07
      },
      "kind": "title",
      "text": "An ex-KLA director of engineering in its EUV mask group – who worked on each of their DUV, actinic EUV, and e-beam projects - stated that non-EUV methods like KLA’s Teron DUV tools are perfectly sufficient as “alternatives for the inspection.”",
      "attrs": null,
      "subkind": "headline",
      "toolName": null,
      "toolSlug": null,
      "confidence": null,
      "componentId": "43d4336b-7b2d-4a30-b6b9-286549d4207c",
      "frameworkName": null,
      "frameworkSlug": null
    }
  ],
  "metrics": [],
  "tools": [],
  "frameworks": [
    {
      "name": "authority-citation",
      "slug": null,
      "matchId": "2c8a5489-4ad2-428b-afd6-a33952d247b8",
      "evidence": "Citing an ex-KLA director to validate the efficacy of DUV tools over actinic inspection.",
      "confidence": 0.9
    }
  ],
  "arcBeats": [],
  "loops": [],
  "imagePathAlt": null,
  "thumbSrc": null,
  "thumbSrcAlt": null,
  "locked": true
}