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  "documentTitle": "Lasertec Corporation (6920)",
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  "authorName": "Scorpion Capital",
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  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "The slide uses a Q&A format to highlight specific technical failures of Lasertec equipment, contrasting the company's claims with field experience.",
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      "text": "Although TSMC can get by with its current DUV machines, the engineer stated that Lasertec’s product simply won’t work for TSCM’s 3nm node.",
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      "text": "DUV laser source is unstable for both X8 and X9 ULTRA legacy machines; “a lot of software bugs”; doesn't work for 3nm",
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      "text": "However, although TSMC is forced to rely on Lasertec's old DUV tools versus EUV, its DUV line – known as MATRICS X8 ULTRA, and the more recent X9 – is plagued by light source defects as serious as those in its EUV source, in addition to other problems.",
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      "text": "An ex-Lasertec field service engineer who was recently based at TSMC's fab in Taiwan, whose main responsibility was the MATRICS DUV machines, provided color as damning as that provided by other field engineers for the ACTIS EUV line: “the laser source is unstable for the X8, X9 ULTRA”; “it has a lot of software bugs”; “bug is always causing random problems...they cannot find critical defects, or the resolution is very bad...the image processing is very bad.” Although TSMC can get by with its current DUV machines, the engineer stated that Lasertec's product simply won't work for TSCM's 3nm node.",
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      "text": "“the laser source is unstable for the X8, X9 ULTRA”; “it has a lot of software bugs”; “bug is always causing random problems...they cannot find critical defects, or the resolution is very bad...the image processing is very bad.” — Former Lasertec field service engineer at TSMC fab in Taiwan",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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      "text": "Q: “How well did the X8 and 9 work? How reliable was it?” A: “The laser source is unstable, for the X8, X9ULTRA.” Q: “You're saying the light source for the X9ULTRA is not stable?” A: “Yes, and X8ULTRA is more stable than X9ULTRA.” Q: “Was TSMC happy with the X8ULTRA, or were they having problems with it?” A: “The image calculation function is not very natural...it has a lot of software bugs...when the X8ULTRA scans a photo mask, when they find some defect, the software bug is always causing random problems...they cannot find critical defects, or the resolution is very bad.” Q: “The resolution is very bad?” A: “Yes. The image processing is not good...the image processing is very bad.” Q: “This is for the X8ULTRA?” A: “Yes, because the X8ULTRA for 3 nanometers has limitations. So, probably 5 nanometers is good, but 3 is not always good because of the laser source, the design is all for 5 or 7-nanometers...it was very suitable for 5 nanometers, not for 3 nanometers.” – Former Lasertec field service engineer at TSMC fab in Taiwan",
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