{ "docId": "019dd923-622c-750b-8b9a-0f4bec37392f", "docSlug": "f982379e2e48", "documentTitle": "Lasertec Corporation (6920)", "authorId": "58_Scorpion_Capital", "authorName": "Scorpion Capital", "documentKindSlug": "activist-deck", "documentKindLabel": "Activist deck", "sourceTypeSlug": "short_seller", "sourceTypeLabel": "Short seller", "presentationDate": "2024-06-05 00:00:00", "orientation": "landscape", "aspectRatio": 1.3333334, "pageNumber": 217, "pageCount": 334, "prevPage": 216, "nextPage": 218, "slideType": "expose_contradiction", "function": "expose_contradiction", "density": "overcrowded", "nDataPoints": 0, "notes": "The slide uses a Q&A format to highlight specific criticisms of Lasertec's ACTIS A150 and A300 tools.", "elementsJson": [ "paragraph", "quote_block", "footnote" ], "metadataConfidence": 1, "imagePath": null, "slideHref": "/slides/019dd923-622c-750b-8b9a-0f4bec37392f/217", "deckHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f", "deckJsonHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f.json", "deckAnchorHref": "/decks/019dd923-622c-750b-8b9a-0f4bec37392f#slide-217", "components": [ { "bbox": null, "kind": "callout", "text": "TSMC will not consider the A300 or A150 for production...they will only exist in the...mask house.", "attrs": null, "subkind": null, "toolName": "Visual emphasis", "toolSlug": "visual-emphasis", "confidence": null, "componentId": "019dd953-78b7-702e-9617-30f57e08609c", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.05, "w": 0.86, "x": 0.07, "y": 0.38 }, "kind": "paragraph", "text": "TSMC “will not consider” Lasertec’s EUV tool for production; only a niche lab/R&D tool in the mask shop; using legacy DUV inspection machines instead as EUV inspection “is not necessary”; only purchased six A150 machines", "attrs": null, "subkind": "paragraph", "toolName": null, "toolSlug": null, "confidence": null, "componentId": "380a0089-2b00-48fc-a35f-f1d784854313", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.05, "w": 0.86, "x": 0.07, "y": 0.67 }, "kind": "paragraph", "text": "TSMC “is not happy with Lasertec”; “very expensive but the throughput is slow”; only need quick, lower resolution inspection in the fab but with higher throughput which Lasertec’s tool cannot provide", "attrs": null, "subkind": "paragraph", "toolName": null, "toolSlug": null, "confidence": null, "componentId": "663e20ae-ffe1-412f-81a3-11ab6e711b97", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.18, "w": 0.86, "x": 0.07, "y": 0.73 }, "kind": "quote", "text": "Q: “It sounds to me like TSMC is not really that happy with Lasertec. Is that accurate?” A: “No. TSMC is not happy with Lasertec so far...It’s the throughput. It’s very expensive, but the throughput is slow. TSMC has explained to Lasertec, the defects TSMC wants to identify in production are like falling particles. The ASML EUV tool has a very strong light source, and it can damage your pattern. So, TSMC just wants to do quite frequent monitoring. Every day, they check the mask. A quick check. If you go through a quick check, the best resolution is not necessary. It’s not necessary.” – Longtime ex-TSMC procurement executive who introduced Lasertec inspection tools into TSMC", "attrs": null, "subkind": "testimonial", "toolName": null, "toolSlug": null, "confidence": null, "componentId": "9012895e-8057-424c-86ca-68598bf5998b", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.22, "w": 0.86, "x": 0.07, "y": 0.44 }, "kind": "quote", "text": "A: “Both the LastertecX8 Ultra and X9 Ultra are the DUV light source, but they are inspecting the EUV mask. The main reason is for the throughput. And it is not necessary...” Q: “You’re saying TSMC uses the X8 and X9 Ultra in the fab instead of the ACTIS?” A: “Yes. Because of the throughput. TSMC will not consider the A300 or A150 for production. They will only exist in the EPO mask house. The EPO—we call it the EP Organization in TSMC. TSMC has already purchased six sets of A150. So, they already bought six tools. Six A150 tools. But last year, they also purchased the first A300. And the first A300 because they changed the light source, Urashima.” – Longtime ex-TSMC procurement executive who introduced Lasertec inspection tools into TSMC", "attrs": null, "subkind": "testimonial", "toolName": null, "toolSlug": null, "confidence": null, "componentId": "f2854929-766d-4c9a-8937-cbdfef4577b4", "frameworkName": null, "frameworkSlug": null }, { "bbox": null, "kind": "quote", "text": "No. TSMC is not happy with Lasertec so far...It's the throughput. It's very expensive, but the throughput is slow. TSMC just wants to do quite frequent monitoring. Every day, they check the mask. A quick check. If you go through a quick check, the best resolution is not necessary. It's not necessary. — Longtime ex-TSMC procurement executive who introduced Lasertec inspection tools into TSMC", "attrs": null, "subkind": null, "toolName": "Authority citation", "toolSlug": "authority-citation", "confidence": null, "componentId": "019dd953-78b7-702e-9617-34497c746f23", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.02, "w": 0.25, "x": 0.07, "y": 0.95 }, "kind": "source-note", "text": "Source: Scorpion Capital consultation calls with experts", "attrs": null, "subkind": null, "toolName": null, "toolSlug": null, "confidence": null, "componentId": "e193c9e5-8236-4156-9a23-3c5656b7cfd7", "frameworkName": null, "frameworkSlug": null }, { "bbox": { "h": 0.15, "w": 0.86, "x": 0.07, "y": 0.07 }, "kind": "title", "text": "The TSMC executive repeatedly and strongly emphasized that Lasertec’s tool is a failure that cannot be used inside the fab to inspect masks during production, given its low throughput and inability to inspect more than a few masks per day", "attrs": null, "subkind": "headline", "toolName": null, "toolSlug": null, "confidence": null, "componentId": "1d68e680-dc9d-4c0a-883a-1a59754a64a1", "frameworkName": null, "frameworkSlug": null } ], "metrics": [], "tools": [], "frameworks": [], "arcBeats": [], "loops": [], "imagePathAlt": null, "thumbSrc": null, "thumbSrcAlt": null, "locked": true }