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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "TSMC is still relying mostly on traditional KLA tools, not Lasertec actinic inspection",
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      "text": "We spoke with TSMC's former head of TSMC R&D... a former longtime TSMC procurement executive... a senior semicap executive in Japan... and an ex-KLA executive...",
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      "text": "Multiple research sources indicated that TSMC's experience with Lasertec has been a disaster, not only with its ACTIS EUV mask inspection line but also with its legacy DUV MATRICS X8 and X9 machines.",
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      "text": "Taiwan is very smart. They always wait for Intel and these guys to go first...they usually do not want to take the risk of being the first...that happened for EUV...were really slow...still used the traditional tools like KLA",
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      "text": "Q: \"Did TSMC buy a bunch of the Lasertec ACTIS A150 machines...?\" A: \"Initially in the first 7-nanometer or 5, it was a big phase for EUV...[T]hey were really slow to pick up because they are very careful about spending...\"",
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      "text": "“Initially in the first 7-nanometer or 5, it was a big phase for EUV...Taiwan is very smart. They always wants to wait for Intel and these guys to go first, and then TSMC really comes in big time to copy all the protocols...they were really slow to pick up because they are very careful about spending. So, they still used the traditional tools like KLA...there are second choices...KLA is not just sitting there. KLA also has very strong inspection mask manufacturing for EUV. So, KLA does offer some alternatives.” — Former head of TSMC R&D; played key role in 5nm transition and vendor/tool selection",
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