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      "text": "Source: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/PC12494/PC124940E/Improvement-of-LDP-EUV-source-performance-for-actinic-patterned-mask/10.1117/12.2671128.full; https://www.spiedigitallibrary.org/conference-proceedings-of-spie/PC12915/PC1291504/Progress-report-on-actinic-patterned-mask-inspection-for-EUVL/10.1117/12.3012431.short",
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      "text": "The same key Intel employee presented at SPIE in May and September 2023. Even the titles suggest ongoing struggles – the May paper is titled “Improvement of LDP EUV source performance” and the September one is “Progress report...” Once again, key performance charts in both presentations omit the Y-axis with no units or numbers, yet the presenter once again declares mission accomplished: “These improvements have enabled achieving a performance and reliability level that exceeds the HVM targets” – referring to high volume manufacturing.",
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