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  "documentTitle": "Lasertec Corporation (6920)",
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  "presentationDate": "2024-06-05 00:00:00",
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      "text": "Intel's mask inspection group seems keen to save face and cover up that its massive investment in and sponsorship of Lasertec has been a debacle.",
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      "text": "Lasertec - in its current incarnation as an “EUV inspection equipment” stock - is Intel’s baby. Intel’s mask inspection group seems keen to save face and cover up that its massive investment in and sponsorship of Lasertec has been a debacle.",
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      "text": "Circa 2018, the industry began planning to use ASML’s EUV scanners for 7nm and 5nm production. However, the lack of actinic patterned mask inspection (APMI) – inspecting EUV masks through a thin protective membrane called a pellicle – became a major gap in the EUV lithography supply chain. Our sources indicate that Intel pushed KLA to develop an EUV mask inspection tool, but KLA asked for too much money. Intel then pressured Lasertec to rush a tool to market. A 2018 trade publication stated that Lasertec “obtained funding for the technology” from “a large chipmaker” – asked if this was true, Lasertec replied “no comment.”",
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      "text": "Still, the industry wants actinic pattern mask inspection (APMI). APMI can supposedly find more defects than today's inspection systems. So far, though, APMI does not exist, but several entities are developing the technology in R&D.... While those efforts are ongoing, Lasertec is reportedly developing an APMI tool, according to sources. Lasertec has also obtained funding for the technology from a large chipmaker, sources added...Hiroshi Asai, general manager of corporate planning at Lasertec, in a recent e-mail. “We have not developed an actinic ‘pattern’ mask inspection system.” Asked if Lasertec is developing an actinic pattern mask inspection system or considering to develop one, Asai said: “I have no comment to make on your questions.”",
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      "text": "We have not developed an actinic ‘pattern’ mask inspection system. I have no comment to make on your questions. — Hiroshi Asai, general manager of corporate planning at Lasertec",
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      "text": "Source: https://semiengineering.com/whats-missing-in-euv/",
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      "text": "What's Missing In EUV?",
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