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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "Numerical aperture – the NA – is shown only for the older A150 but missing for the A300",
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      "text": "Slides accompanying Lasertec SPIE paper on ACTIS A300 High NA capabilities. Nov 21, 2023",
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      "text": "Instead of being transparent and showing photos of their High NA projection optics as ASML and its strategic partner Zeiss have done for years, Lasertec's engineers show only a simple, crude drawing to compare the optics design in the A150 with the A300. Comically, both diagrams are identical except that the one for the A300 is just slightly expanded. As a major red flag, the diagram states the NA – numerical aperture – for the A150 but omits it entirely for the A300 and says only that it is a “larger objective NA.”",
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      "text": "Source: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12751/1275102/Actinic-pattern-mask-inspection-for-high-NA-EUV-lithography/10.1117/12.2686350.short?webSyncID=9e6ec7a4-9dab-6a0c-bad0-59329ad883c9&sessionGUID=d902bc99-93ce-d268-bead-49a28531ab0d",
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