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  "documentTitle": "Lasertec Corporation (6920)",
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  "authorName": "Scorpion Capital",
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      "text": "It's different issues, but the same results happen on their inspections. They get a dark frame or they get a false defect...it's light source fluctuation.",
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      "text": "Both Ushio and Urashima cause inspection problems such as dark frames and false defects due to light source fluctuation; problems to due to difficulties in controlling plasma; Urashima doesn’t have enough power and illumination as “plasma is smaller”",
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      "text": "Although the Urashima source attempts to use laser-produced plasma (LPP) similar to ASML’s technology, where the plasma is better controlled, versus the Ushio source’s inferior laser-assisted discharge-produced-plasma (LDP) approach, Urashima is still plagued by the same inspection failures as Ushio. The plasma which emits EUV is just as unstable, leading to fluctuations and lack of brightness and power. The Ushio engineer provided details we find damning: “...the same results happen on their inspections” with Urashima; “they get a dark frame or they get a false defect...it’s light source fluctuation”; “in these light sources, the brightness is just going to fluctuate”; “difficult thing to control”; “hard to get enough power...to get the brightness up.”",
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      "text": "A: “It's different issues, but the same results happen on their inspections. They get a dark frame or they get a false defect...it's light source fluctuation. In these light sources, the brightness is just going to fluctuate just as a function of the physics of the plasma. In the Ushio source there's a discharge between two electrodes. That means the plasma has a lot of freedom to move. And so, that causes fluctuation and brightness. That's a difficult thing to control. The other light source is laser-produced plasma. There's no discharge between electrodes. It's just the laser creates the plasma. That tends to be much more stable, but it's hard to get enough power into that to get the brightness up. As a result, the plasma is usually smaller. That can create problems with not getting enough illumination into the tool.”\nQ: “What happens when you don't get enough illumination in the tool?”\nA: “It's similar. If the plasma is moving, every once in a while, you'll get a frame where there's just not enough light and uniformity. If you're not getting full brightness all the way to the edge of the frame, then you're going to have dark areas, and that's going to cause a false defect to show up...multiple things can combine, so if a light source is starting to dim and there's a component on the tool side that's dimming, a mirror or lens or something, then they combine and cause problems.”– Ushio field engineer who maintains light sources on Lasertec ACTIS A150 machines at Intel Oregon fab",
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      "text": "It's different issues, but the same results happen on their inspections. They get a dark frame or they get a false defect...it's light source fluctuation. In these light sources, the brightness is just going to fluctuate just as a function of the physics of the plasma. In the Ushio source there's a discharge between two electrodes. That means the plasma has a lot of freedom to move. And so, that causes fluctuation and brightness. That's a difficult thing to control. The other light source is laser-produced plasma. There's no discharge between two electrodes. It's just the laser creates the plasma. That tends to be much more stable, but it's hard to get enough power into that to get the brightness up. As a result, the plasma is usually smaller. That can create problems with not getting enough illumination into the tool. — Ushio field engineer who maintains light sources on Lasertec ACTIS A150 machines at Intel Oregon fab",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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