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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "The fact that the Isteq source was available prior to the ACTIS A150 launch in 2019/2020 suggests that Lasertec evaluated it years ago and concluded it was inferior to the Ushio source they first chose.",
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      "text": "Source: https://patentimages.storage.googleapis.com/78/09/07/ee8f012cefba27/WO2020216950A1.pdf; https://www.euvlitho.com/2021/SS19.pdf",
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