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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "The stage \"makes particles\" that cause contamination, degrading the imaging optics and mirrors, costs millions of dollars a year to clean",
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      "text": "The stage has a problem with particulation...all of them contribute to the degradation of the imaging optics and also the particulation on the actual mask; the stage has two problems: significantly high cost and complexity and...the fact that it produces particulation into the entire area of the cavity of the tool, which consists of a large, open vacuum chamber that can't be partitioned with barriers as EUV cannot travel through air or glass.",
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      "text": "Q: \"You said the optics are getting off-gassing and particles from the stage. So, you said they have to replace the optics or they have to clean those as well?\" A: \"Together with the problem with the source of off-gassing, also the stage has a problem with particulation and off-gassing, all of them contribute to the degradation of the imaging optics and also the particulation on the actual mask of the inspection. And this one, you cannot clean. It coats the source of the EUV light until it develops a few mono-layers of coating of this organic composition, and gradually, you lose it, and you have to replace it.\" -Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "Particulate contamination is a major problem as the EUV optics must be in an open cavity without barriers; can't be partitioned with windows or barriers. The stage has two problems: significantly high cost and complexity. and two, the fact that it produces particulation into the entire area. The problem with particles is two-fold. One, there is all the optics of the mask inspection system whether it's Lasertec or KLA is open optic. There is no window anywhere because you cannot put windows in EUV. So, it's a big, big chamber or two chambers are connected with a phalange. -Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "\"The stage has two problems: significantly high cost and complexity. and two, the fact that it produces particulation into the entire area. The problem with particles is two-fold. One, there is all the optics of the mask inspection system whether it's Lasertec or KLA is open optic. There is no window anywhere because you cannot put windows in EUV. So, it's a big, big chamber or two chambers are connected with a phalange.\" — Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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      "text": "The stage creates a third source of contamination - compounding the problems from tin splatter from the plasma reaction used to emit EUV light, and off-gassing",
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