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  "documentTitle": "Lasertec Corporation (6920)",
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  "notes": "Includes a direct quote from a former KLA executive and technical diagrams of the Sumitomo product.",
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      "text": "That's the number one source of particle generation that they have.",
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      "text": "Sumitomo 'Vacuum Air Servo Stage' for semiconductor manufacturing",
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      "text": "The pressure forces and releases particles, causing contamination that ruins the mask, in addition to being extremely complex and expensive with a cost in the millions per stage: “it’s very complex and very, very expensive...multiple millions...it uses pressure and then they try to suck it back up...it releases particles into the cavity of the optics...that’s the number one source of particle generation that they have.”",
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      "text": "Sumitomo stage requires a vacuum and ‘releases particles into the cavity of the optics’; top source of contamination... [Q&A transcript] ... That’s the number one source of particle generation that they have.” –Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "Source: Scorpion Capital consultation calls with experts; https://www.shi-mechatronics.jp/solutions/en/case/airservo/174/; https://www.shi-mechatronics.jp/solutions/airservo/",
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      "text": "The Sumitomo stage uses a crude pneumatic system that operates inside a vacuum, using pressure to move the mask versus ASML’s magnetic levitation.",
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