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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "The entire optical system inside Lasertec’s EUV inspection tool needs to be replaced at least every year: “...it coats the source of the EUV light until it develops a few mono-layers of coating...and gradually you lose it...and have to replace it”: “I heard every year that they have to replace the optics...the refurbishing of those optics costs at least a million dollars or more...they need to replace mirror number two, mirror number four, and that could cost at least half a million dollars each.”",
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      "text": "Our research interviews indicate that the net result of the contamination and frequent maintenance and refurbishing is that the entire optical system inside Lasertec’s EUV inspection tool needs to be replaced at least every year: “...it coats the source of the EUV light until it develops a few mono-layers of coating...and gradually you lose it...and have to replace it”: “I heard every year that they have to replace the optics...the refurbishing of those optics costs at least a million dollars or more...they need to replace mirror number two, mirror number four, and that could cost at least half a million dollars each.”",
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      "text": "A: “...and this one, you cannot clean. It coats the source of the EUV light until it develops a few mono-layers of coating of this organic composition, and gradually, you lose it, and you have to replace it.” Q: “So, you have to replace the optics. How often do they have to replace the optics, and how much does that cost?” A: “I heard every year that you need to replace the imaging optics right now...the coating and the amount of VOC are such that every year they have to replace the optics, and this costs—the refurbishing of those optics costs at least a million dollars or more. They need to replace mirror number two, mirror number four, and that would cost at least half a million dollars each.” –Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "“...and this one, you cannot clean. It coats the source of the EUV light until it develops a few mono-layers of coating of this organic composition, and gradually, you lose it, and you have to replace it.” “I heard every year that you need to replace the imaging optics right now...the coating and the amount of VOC are such that every year they have to replace the optics, and this costs—the refurbishing of those optics at least a million dollars or more. They need to replace mirror number two, mirror number four, and that would cost at least half a million dollars each.” — Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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