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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "For an inspection tool, replacement of components (e.g. electrodes) every week is not an option. Maintenance time of 5-10% represents a serious problem for the entire tool availability.",
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      "text": "Every % of tool availability is critical for mask shops that run 24/7…anything less than 85% is not acceptable — KLA Presentation",
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      "text": "A KLA presentation on EUV mask inspection highlighted the absolute requirement for light source uptime, which Lasertec’s pitiful ~60% metric obviously fails to meet",
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