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      "text": "With insufficient light source stability and brightness, \"you’ll get a frame where there’s just not enough light and uniformity...you’re going to have dark area and that’s going to cause a false defect to show up.\"",
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      "text": "The Ushio engineer elaborated on the mask inspection problems and failures caused by the EUV light source's instability and lack of brightness and power: \"they get a dark frame or they get a false defect...it's light source fluctuation...the brightness is just going to fluctuate just as a function of the physics of the plasma.\" He stated that the tin-based plasma reaction is poorly controlled: \"the plasma has a lot of freedom to move...that causes fluctuation...a difficult thing to control\"; \"it's hard to get enough power\" to \"get the brightness up...as a result the plasma is smaller...that can create problems with not getting enough illumination into the tool.\" With insufficient light source stability and brightness, \"you'll get a frame where there's just not enough light and uniformity...you're going to have dark area and that's going to cause a false defect to show up.\"",
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      "text": "Ushio light source causes inspection problems such as dark frames and false defects due to light source fluctuation; problems to due to difficulties in controlling plasma; Urashima doesn't have enough power and illumination",
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      "text": "Q: \"What happens when you don't get enough illumination in the tool?\"\nA: \"It's similar. If the plasma is moving, every once in a while, you'll get a frame where there's just not enough light and uniformity. If you're not getting full brightness all the way to the edge of the frame, then you're going to have dark areas, and that's going to cause a false defect to show up...multiple things can combine, so if a light source is starting to dim and there's a component on the tool side that's dimming, a mirror or lens or something, then they combine and cause problems.\"—Ushio field engineer who maintains light sources on Lasertec ACTIS A150 machines at Intel Oregon fab",
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      "text": "A: \"It's different issues, but the same results happen on their inspections. They get a dark frame or they get a false defect...it's light source fluctuation. In these light sources, the brightness is just going to fluctuate just as a function of the physics of the plasma. In the Ushio source there's a discharge between two electrodes. That means the plasma has a lot of freedom to move. And so, that causes fluctuation and brightness. That's a difficult thing to control. The other light source is laser-produced plasma. There's no discharge between electrodes. It's just the laser creates the plasma. That tends to be much more stable, but it's hard to get enough power into that to get the brightness up. As a result, the plasma is usually smaller. That can create problems with not getting enough illumination into the tool.\"",
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      "text": "\"they get a dark frame or they get a false defect...it’s light source fluctuation...the brightness is just going to fluctuate just as a function of the physics of the plasma.\" — Ushio field engineer who maintains light sources on Lasertec ACTIS A150 machines at Intel Oregon fab",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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