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  "documentTitle": "Lasertec Corporation (6920)",
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      "text": "Lasertec light source is highly instable due to electrode erosion where the tin is ignited to create plasma",
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      "text": "ACTIS light source “main problems” – “flickering candle”; “high repeatability” was a “big challenge”; “drifted out of focus”",
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      "text": "I was a field service engineer at the home office location in San Jose for Lasertec USA. I was hands-on on the ACTIS line, particularly the ACTIS A150. These were for mask inspection exclusively. There were three machines...I’d say there were definitely a lot of challenges with the tool, and the light source in and of itself was out of Lasertec’s hand at the time with the A150. Ushio would do the light source replacements and maintenance. There were engineering differences to try to resolve some of the main problems that we experienced with Ushio - it was basically like a flickering candle when you were trying to utilize it like a laser. Having high repeatability became a big challenge. They needed someone on the back end, like someone in my position, to be able to call, worst case, if the light drifted out of focus or too far out that Intel engineers couldn’t step in and resolve it themselves.",
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      "text": "Q: “You said aside from the debris, you said there was an issue with the stability of the light and it’s flickering.” A: “Yeah. Because the steady state, how much you can bond that tin, is not perfect. If you think about ASML, how they manage the tin, they are using a droplet generator. They are making sure that every drop is the same, and then they knock that with IR, and you have the EUV emitting for each drop the same way, unlike the Ushio source, which has a problem because the tin, when it splashes between those two fans and the discharge has electrodes, the electrodes have erosion and, therefore, it’s not stable, and it’s changing all the time.”",
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      "text": "“I was hands-on on the ACTIS line, particularly the ACTIS A150. These were for mask inspection exclusively. There were three machines...I'd say there were definitely a lot of challenges with the tool, and the light source in and of itself was out of Lasertec's hand at the time with the A150. Ushio would do the light source replacements and maintenance. There were engineering differences to try to resolve some of the main problems that we experienced with Ushio - it was basically like a flickering candle when you were trying to utilize it like a laser. Having high repeatability became a big challenge. They needed someone on the back end, like someone in my position, to be able to call, worst case, if the light drifted out of focus or too far out that Intel engineers couldn't step in and resolve it themselves.” — Former Lasertec field service engineer who worked in the Intel mask shop",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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      "text": "The engineers corroborated information we received from a KLA mask inspection executive that Lasertec’s EUV source is highly instable due to electrode erosion",
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