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  "documentTitle": "Lasertec Corporation (6920)",
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  "authorName": "Scorpion Capital",
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  "presentationDate": "2024-06-05 00:00:00",
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  "notes": "Uses a technical diagram to expose a potential failure point in the technology.",
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      "kind": "callout",
      "text": "“LDP EUV source is the most critical enabler of actinic patterned mask inspection technology”\n\n“Laser irradiation not only vaporizes tin and forms a tin vapor cloud...”",
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      "text": "It is self-evident that the process would create tin splatter and clouds of debris inside the Lasertec tool.",
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      "text": "Diagram of LDP EUV source showing laser, tin supply discs, liquid tin bath, and capacitor.",
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      "text": "The paper describes the key components for the EUV source: a liquid “hot tin bath”; a “source head” consisting of two rotating metal discs submerged in liquid tin; and an electrode/capacitor bank that ignites the tin mixture similar to a spark plug in a car, creating plasma that emits EUV light. It is self-evident that the process would create tin splatter and clouds of debris inside the Lasertec tool.",
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      "text": "LDP EUV source is the most critical enabler of actinic patterned mask inspection technology — March 2021 Ushio/Intel paper",
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      "text": "Source: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11609/116090L/Laser-assisted-discharge-produced-plasma-LDP-EUV-source-for-actinic/10.1117/12.2588788.short",
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      "text": "March 2021 Ushio/Intel paper illustrates the key components of the EUV light source, excerpts below",
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