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  "documentTitle": "Lasertec Corporation (6920)",
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  "presentationDate": "2024-06-05 00:00:00",
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      "text": "Lasertec EUV light source ignites tin and splashes it everywhere, creating puddles of tin splatter, debris, and contamination; debris mitigation approaches don't work; “no way out”",
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      "text": "1) contamination and debris from tin splatter; 2) instability and flickering which leads to false positives and other mask inspection failures; 3) onerous cleaning and maintenance that leads to a pitifully low uptime and throughput; and 4) a short lifespan that drives frequent replacement and a burdensome cost of ownership. We begin with contamination, which results from the ignition of molten tin into plasma prior to the production and collection of EUV light. An ex-KLA executive in a leadership role in their EUV mask inspection group – who has extensively interacted with Lasertec and is intimately familiar with their technology - described “molten tin that splashes everywhere” with “puddles in the air” that “coat everything,” with “no way out” of the problem via attempts at “debris mitigation.”",
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      "text": "Q: “You also mentioned a problem with the stability of their light source and other issues. What's the problem with their source? You said they're trying to switch the source to somebody else now.”\nA: “Yes. This source is based on electrical discharge between two electrodes... molten tin that splashes in between those scans and creates a sustaining puddle in the air... you have those puddles... the molten tin is splashing everywhere... there is no way out. It's too messy.” -Former KLA executive in a leadership role in their EUV mask inspection group",
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      "text": "Source: Scorpion Capital consultation calls with experts",
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      "text": "Lasertec’s Ushio-supplied EUV source is plagued by a number of fatal problems:",
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